Furnace tube size

Φ350mmX1300mm，Single-side end cap structure

Vertical heating zone length

Average temperature zone Ø350×500mm

Working temperature

≤1000℃

Max. temperature

1100℃

Heating method

High-quality alloy heating wire, the heating wire is annularly embedded in the furnace surface

Chamber material

Alumina polycrystalline fiber, good thermal insulation performance

Temperature control method

Multi-stage PID intelligent program temperature control

Control method

LCD touch screen operation, intelligent multi-stage PID programmable control
The temperature control system adopts artificial intelligence adjustment technology, has PID adjustment, self-tuning functions and can compile multi-stage temperature rise and fall programs;
1. Use PID to adjust temperature control, and can set multi-stage temperature rise and fall programs;
2. Temperature control accuracy ±1ºC;
3. Over-temperature protection and broken couple protection. The electric furnace heating circuit is automatically cut off when over-temperature or broken couple is used;
4. The instrument has the function of temperature self-tuning;
5. Touch screen operation, the temperature rise curve can be displayed in real time, and the data can be output and stored.

Heating rate

0-20ºC/min ，10ºC/min is recommended,can be adjusted freely according to the process.

Flange seal

Equipped with stainless steel water-cooled flange, the interface is sealed with metal gasket or fluororubber.
Ring seal, flange with fastening device, with air inlet and outlet and vacuum pump interface.

Inlet and outlet design

One-in-two-out design

Furnace structure

Vertical structure, electric lifting bell type

Gas system

Name

Two-way mass flow meter

Main parameters

Two-channel precision mass flowmeter: touch screen control, digital display, automatic control. Flow range:
1. MFC 1-MFC2: Hydrogen, argon 0-1000sccm/10L adjustable
2. A gas mixing tank
3. 2 stainless steel needle valves are installed on the left side of the gas supply system, and 2 gases can be manually controlled;
4. Inlet and outlet: 2 inlet and 1 outlet
Connection method: double ferrule connection

Vacuum system parts

Main parameters

1. The vacuum degree of the vacuum pump can reach 5pa
2. KF25 quick connection, stainless steel bellows, manual baffle valve and flange, connected to the vacuum pump;
3. The resistance vacuum gauge displays

Water Cooling System

Equipped with a water cooler to cool the flange

After-sales service

One-year warranty, lifetime warranty (heating elements, furnace tube consumables and other accessories provided with the device are not covered by the warranty)